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Results:
1-12
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Results: 12
Authors:
Angelkort, C
Lewalter, H
Warbichler, P
Hofer, F
Bock, W
Kolbesen, BO
Citation: C. Angelkort et al., Formation of niobium nitride by rapid thermal processing, SPECT ACT A, 57(10), 2001, pp. 2077-2089
Authors:
Galesic, I
Reusch, U
Angelkort, C
Lewalter, H
Berendes, A
Schweda, E
Kolbesen, BO
Citation: I. Galesic et al., Nitridation of vanadium in molecular nitrogen: a comparison of rapid thermal processing (RTP) and conventional furnace annealing, VACUUM, 61(2-4), 2001, pp. 479-484
Authors:
Kolbesen, BO
Cerva, H
Citation: Bo. Kolbesen et H. Cerva, Defects due to metal silicide precipitation in microelectronic device manufacturing: The unlovely face of transition metal silicides, PHYS ST S-B, 222(1), 2000, pp. 303-317
Authors:
Landau, SA
Junghans, N
Weiss, PA
Kolbesen, BO
Olbrich, A
Schindler, G
Hartner, W
Hintermaier, F
Dehm, C
Mazure, C
Citation: Sa. Landau et al., Scanning probe microscopy - a tool for the investigation of high-k materials, APPL SURF S, 157(4), 2000, pp. 387-392
Authors:
Galesic, I
Angelkort, C
Lewalter, H
Berendes, A
Kolbesen, BO
Citation: I. Galesic et al., Formation of transition metal nitrides by rapid thermal processing (RTP), PHYS ST S-A, 177(1), 2000, pp. 15-26
Authors:
Schulze, HJ
Frohnmeyer, A
Niedernostheide, FJ
Simmnacher, B
Kolbesen, BO
Tutto, P
Pavelka, T
Wachutka, G
Citation: Hj. Schulze et al., Analytical tools for the characterization of power devices, J ELCHEM SO, 147(10), 2000, pp. 3879-3888
Authors:
Galesic, I
Kolbesen, BO
Citation: I. Galesic et Bo. Kolbesen, Characterization of transition metal nitride formation in rapid thermal processing (RTP), FRESEN J AN, 365(1-3), 1999, pp. 199-202
Authors:
Bock, H
Sievert, M
Bogdan, CL
Kolbesen, BO
Wittershagen, A
Citation: H. Bock et al., Interactions in crystals. 139. Biphenylene ring expansion by a (H3C)(2)Si link from silicone grease as proven by the crystal structures of [(sodium(+)[2.2.1]cryptand)(9,9-dimethylsilafluorene(center dot-))] as well as [sodium(+)(triglyme)2(biphenylene(center dot-))] and by total-reflection X-ray fluroescence spectrometry (TXRF), ORGANOMETAL, 18(12), 1999, pp. 2387-2389
Authors:
Martin, AR
Baeyens, M
Hub, W
Mertens, PW
Kolbesen, BO
Citation: Ar. Martin et al., Alkaline cleaning of silicon wafers: additives for the prevention of metalcontamination, MICROEL ENG, 45(2-3), 1999, pp. 197-208
Authors:
Galesic, I
Kolbesen, BO
Citation: I. Galesic et Bo. Kolbesen, Formation of vanadium nitride by rapid thermal processing, THIN SOL FI, 349(1-2), 1999, pp. 14-18
Authors:
Pfitzner, U
Kirichenko, A
Konstantinov, AA
Mertens, M
Wittershagen, A
Kolbesen, BO
Steffens, GCM
Harrenga, A
Michel, H
Ludwig, B
Citation: U. Pfitzner et al., Mutations in the Ca2+ binding site of the Paracoccus denitrificans cytochrome c oxidase, FEBS LETTER, 456(3), 1999, pp. 365-369
Authors:
Schulze, HJ
Kolbesen, BO
Citation: Hj. Schulze et Bo. Kolbesen, Influence of silicon crystal defects and contamination on the electrical behavior of power devices, SOL ST ELEC, 42(12), 1998, pp. 2187-2197
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