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Results: 2
Multi-Nano for the finish grinding of semiconductor materials
Authors: Konnemann, G Eichhorn, H Petzold, R
Citation: G. Konnemann et al., Multi-Nano for the finish grinding of semiconductor materials, IND DIAM RE, 60(4), 2000, pp. 301-303
Nanogrinder for high precision machining of silicon wafers
Authors: Konnemann, G Eichhorn, H Petzold, R
Citation: G. Konnemann et al., Nanogrinder for high precision machining of silicon wafers, IND DIAM RE, 59(1), 1999, pp. 30
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