Authors: Wernicke, G Bouamama, L Kruschke, O Demoli, N Gruber, H Kruger, S

Citation: G. Wernicke et al., Some investigations in holographic microscopic interferometry with respectto the estimation of stress and strain in micro-opto-electromechanical systems (MOEMS), OPT LASER E, 36(5), 2001, pp. 475-485