Authors: McDonald, A Mahaffy, R Wang, XD Kuklewicz, C Shih, CK Dennis, M Tiffin, D Kadoch, D Duane, M

Citation: A. Mcdonald et al., Quantitative two-dimensional profiling of 0.35 mu m transistors with lightly doped drain structures, J VAC SCI B, 18(1), 2000, pp. 572-575