Authors: LAKSHMANAN SK GILL WN

Citation: Sk. Lakshmanan et Wn. Gill, EXPERIMENTS ON THE PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF COPPER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2187-2197

Authors: NAIK MB LAKSHMANAN SK WENTORF RH REEVES RR GILL WN

Citation: Mb. Naik et al., THERMAL CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM HEXAFLUOROACETYLACETONATE CU(I) VINYLTRIMETHYLSILANE - KINETIC-STUDIES, Journal of crystal growth, 193(1-2), 1998, pp. 133-147

Authors: LAKSHMANAN SK GILL WN

Citation: Sk. Lakshmanan et Wn. Gill, COMPARISON OF EXPERIMENTS WITH A LUMPED-PARAMETER MODEL OF THE PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF COPPER, Journal of the Electrochemical Society, 145(2), 1998, pp. 694-700