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Results:
1-15
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Results: 15
Authors:
KILLAT D
VONKLUGE J
UMBACH J
LANGHEINRICH W
SCHMITZ R
Citation: D. Killat et al., MEASUREMENT AND MODELING OF SENSITIVITY AND NOISE OF MOS MAGNETIC FIELD-EFFECT TRANSISTORS, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 346-351
Authors:
SCHILLING F
LANGHEINRICH W
WEIBLEN K
ARAND D
Citation: F. Schilling et al., SIMULATION OF THERMALLY-INDUCED PACKAGE EFFECTS WITH REGARD TO PIEZORESISTIVE PRESSURE SENSORS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 37-39
Authors:
SCHAFER R
HECKER K
HEGGER H
LANGHEINRICH W
Citation: R. Schafer et al., EXPERIMENTAL-STUDY OF MESOSCOPIC FLUCTUATIONS IN NONLINEAR CONDUCTANCE AND MAGNETOCONDUCTANCE, Physical review. B, Condensed matter, 53(23), 1996, pp. 15964-15970
Authors:
LANGHEINRICH W
AHMED H
Citation: W. Langheinrich et H. Ahmed, FABRICATION OF LATERAL TUNNEL-JUNCTIONS AND MEASUREMENT OF COULOMB-BLOCKADE EFFECTS, JPN J A P 1, 34(12B), 1995, pp. 6956-6960
Authors:
ROMBACH P
STEIGER H
LANGHEINRICH W
Citation: P. Rombach et al., PLANAR COILS WITH FERROMAGNETIC YOKE FOR A MICROMACHINED TORQUE SENSOR, Journal of micromechanics and microengineering, 5(2), 1995, pp. 136-138
Authors:
ROMBACH P
LANGHEINRICH W
Citation: P. Rombach et W. Langheinrich, MODELING OF A MICROMACHINED TORQUE SENSOR, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 294-297
Authors:
KILLAT D
LANGHEINRICH W
Citation: D. Killat et W. Langheinrich, SIGNAL-PROCESSING FOR MAGNETIC MICRO TORQUE SENSORS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 315-319
Authors:
LANGHEINRICH W
Citation: W. Langheinrich, THE INFLUENCE OF THE SUBSTRATE ON PROXIMITY EFFECT AND EXPOSURE DOSE FOR THE INORGANIC RESIST LIF(ALF3), Microelectronic engineering, 27(1-4), 1995, pp. 199-202
Authors:
ROMBACH P
LANGHEINRICH W
Citation: P. Rombach et W. Langheinrich, AN INTEGRATED SENSOR HEAD IN SILICON FOR CONTACTLESS DETECTION OF TORQUE AND FORCE, Sensors and actuators. A, Physical, 42(1-3), 1994, pp. 410-416
Authors:
LANGHEINRICH W
BENEKING H
Citation: W. Langheinrich et H. Beneking, THE RESOLUTION OF THE INORGANIC ELECTRON-BEAM RESIST LIF(ALF(3)), Microelectronic engineering, 23(1-4), 1994, pp. 287-290
Authors:
HECKER K
HEGGER H
SCHAFER R
MUREK U
BRADEN C
LANGHEINRICH W
Citation: K. Hecker et al., LENGTH DEPENDENCE OF CONDUCTANCE FLUCTUATIONS IN METALLIC NANOBRIDGES, Physical review. B, Condensed matter, 50(24), 1994, pp. 18601-18606
Authors:
SCHMIDT G
LANGHEINRICH W
HEIME K
Citation: G. Schmidt et al., SELECTIVE GROWTH OF SIGE NANOSTRUCTURES BY LOW-PRESSURE VPE, Solid-state electronics, 37(4-6), 1994, pp. 587-589
Authors:
LANGHEINRICH W
BENEKING H
Citation: W. Langheinrich et H. Beneking, FABRICATION OF METALLIC STRUCTURES IN THE 10NM REGION USING AN INORGANIC ELECTRON-BEAM RESIST, JPN J A P 1, 32(12B), 1993, pp. 6218-6223
Authors:
ZUCKER O
LANGHEINRICH W
KULOZIK M
GOEBEL H
Citation: O. Zucker et al., APPLICATION OF OXYGEN PLASMA PROCESSING TO SILICON DIRECT BONDING, Sensors and actuators. A, Physical, 36(3), 1993, pp. 227-231
Authors:
LANGHEINRICH W
SPANGENBERG B
BARTH R
KURZ H
Citation: W. Langheinrich et al., SUPERCONDUCTING SUBMICRON BRIDGES FABRICATED BY ELECTRON-BEAM LITHOGRAPHY AND DRY ETCHING, Microelectronic engineering, 21(1-4), 1993, pp. 479-482
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