Authors: ARKADIEV VA GORNY HE GRUEV DI KARNAUKHOV AA KOLOMIITSEV AI KUMAKHOV MA LANGHOFF N SHANDINTSEV DV WEDELL R

Citation: Va. Arkadiev et al., THE USE OF X-RAY CAPILLARY OPTICS FOR LITHOGRAPHY AND MICROSCOPY, Optical and quantum electronics, 28(3), 1996, pp. 309-314