Authors:
ARKADIEV VA
GORNY HE
GRUEV DI
KARNAUKHOV AA
KOLOMIITSEV AI
KUMAKHOV MA
LANGHOFF N
SHANDINTSEV DV
WEDELL R
Citation: Va. Arkadiev et al., THE USE OF X-RAY CAPILLARY OPTICS FOR LITHOGRAPHY AND MICROSCOPY, Optical and quantum electronics, 28(3), 1996, pp. 309-314