Citation: T. Boudet et al., OPTICAL AND X-RAY CHARACTERIZATION APPLIED TO MULTILAYER REVERSE ENGINEERING, Optical engineering, 37(7), 1998, pp. 2175-2181
Authors:
BERTIN F
CHABLI A
CHIARIGLIONE E
BURDIN M
BERGER M
BOUDET T
LARTIGUE O
RAVEL G
Citation: F. Bertin et al., SPECTROSCOPIC ELLIPSOMETRY WITH COMPENSATOR AND X-RAY SPECULAR REFLECTIVITY FOR CHARACTERIZATION OF THIN OPTICAL-LAYERS ON TRANSPARENT SUBSTRATES, Thin solid films, 313, 1998, pp. 68-72