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PHOTOCHEMICAL DRY-ETCHING OF DOPED AND UNDOPED SILICON-OXIDES
Authors: GRAY DC BUTTERBAUGH JW HIATT CF LAWING AS SAWIN HH
Citation: Dc. Gray et al., PHOTOCHEMICAL DRY-ETCHING OF DOPED AND UNDOPED SILICON-OXIDES, Journal of the Electrochemical Society, 142(11), 1995, pp. 3859-3863
PHOTOCHEMICAL DRY STRIPPING OF SILICON-NITRIDE FILMS
Authors: GRAY DC BUTTERBAUGH JW HIATT CF LAWING AS SAWIN HH
Citation: Dc. Gray et al., PHOTOCHEMICAL DRY STRIPPING OF SILICON-NITRIDE FILMS, Journal of the Electrochemical Society, 142(11), 1995, pp. 3919-3923
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