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Results:
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Results: 2
BULK MICROMACHINING OF GE FOR IR GRATINGS
Authors:
LANG W LEANCU R SCHABER U WIEDAMANN G KAUFL HU
Citation:
W. Lang et al., BULK MICROMACHINING OF GE FOR IR GRATINGS, Journal of micromechanics and microengineering, 6(1), 1996, pp. 46-48
ANISOTROPIC ETCHING OF GERMANIUM
Authors:
LEANCU R MOLDOVAN N CSEPREGI L LANG W
Citation:
R. Leancu et al., ANISOTROPIC ETCHING OF GERMANIUM, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 35-37
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