Authors: LESNIKOVA VP TURTSEVICH AS KRASNITSKY VY EMELYANOV VA NALIVAIKO OY KRAVTSOV SV MAKAREVICH TV

Citation: Vp. Lesnikova et al., THE STRUCTURE, MORPHOLOGY AND RESISTIVITY OF IN-SITU PHOSPHORUS-DOPEDPOLYSILICON FILMS, Thin solid films, 247(2), 1994, pp. 156-161