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LIEFTING JR
DEMKES RHJ
HOUTSMA MAW
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Authors:
LIEFTING JR
SCHREUTELKAMP RJ
VANHELLEMONT J
VANDERVORST W
MAEX K
CUSTER JS
SARIS FW
Citation: Jr. Liefting et al., ELECTRICALLY ACTIVE, ION-IMPLANTED BORON AT THE SOLUBILITY LIMIT IN SILICON, Applied physics letters, 63(8), 1993, pp. 1134-1136