Citation: Ag. Liu et al., INNER SURFACE ION-IMPLANTATION USING DEFLECTING ELECTRIC-FIELD, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 143(3), 1998, pp. 306-310
Authors:
ZENG XC
KWOK TK
LIU AG
CHU PK
TANG BY
SHERIDAN TE
Citation: Xc. Zeng et al., PLASMA-IMMERSION ION-IMPLANTATION OF THE INTERIOR SURFACE OF A SMALL CYLINDRICAL BORE USING AN AUXILIARY ELECTRODE FOR FINITE RISE-TIME VOLTAGE PULSES, IEEE transactions on plasma science, 26(2), 1998, pp. 175-180
Authors:
LIU AG
WANG XF
TANG BY
CHU PK
KO PK
CHENG YC
Citation: Ag. Liu et al., A NOVEL DISTRIBUTED SYSTEM FOR PLASMA IMMERSION ION IMPLANTER CONTROLAND AUTOMATION, Review of scientific instruments, 69(3), 1998, pp. 1495-1498
Citation: Ag. Liu et al., DOSE AND ENERGY UNIFORMITY OVER INNER SURFACE IN PLASMA IMMERSION ION-IMPLANTATION, Journal of applied physics, 84(4), 1998, pp. 1859-1862
Citation: Xc. Zeng et al., PLASMA IMMERSION ION-IMPLANTATION OF THE INTERIOR SURFACE OF A LARGE CYLINDRICAL BORE USING AN AUXILIARY ELECTRODE, Journal of applied physics, 83(1), 1998, pp. 44-49
Citation: Xc. Zeng et al., PULSED SHEATH DYNAMICS IN A SMALL CYLINDRICAL BORE WITH AN AUXILIARY ELECTRODE FOR PLASMA IMMERSION ION-IMPLANTATION, Physics of plasmas, 4(12), 1997, pp. 4431-4434
Authors:
ZENG XC
KWOK TK
LIU AG
CHU PK
TANG BY
SHERIDAN TE
Citation: Xc. Zeng et al., EFFECTS OF THE AUXILIARY ELECTRODE RADIUS DURING PLASMA IMMERSION ION-IMPLANTATION OF A SMALL CYLINDRICAL BORE, Applied physics letters, 71(8), 1997, pp. 1035-1037