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Authors: LOCKE PS HALSTEAD JA REEVES RR

Citation: Ps. Locke et al., REMOTE PLASMA COPPER CVD WITH HYDROGEN AND OXYGEN-ATOMS, Chemical engineering communications, 153, 1996, pp. 211-219

Authors: LEE WW LOCKE PS

Citation: Ww. Lee et Ps. Locke, HYDROGEN-ATOM ASSISTED CVD OF COPPER AT LOW-TEMPERATURES AND IN-SITU GAS-PHASE SPECTROSCOPY STUDIES, Thin solid films, 262(1-2), 1995, pp. 39-45