Authors:
WANG QF
LAUWERS A
DEWEERDT B
VERBEECK R
LOOSEN F
MAEX K
Citation: Qf. Wang et al., A MANUFACTURABLE PROCESS TO IMPROVE THERMAL-STABILITY OF 0.25-MU-M COBALT SILICIDED POLY GATE, IEEE transactions on semiconductor manufacturing, 8(4), 1995, pp. 449-451