Authors: SPRAGUE M SEMKE W ENGELSTAD R LOVELL E CHALUPKA A LOSCHNER H STENGL G

Citation: M. Sprague et al., STENCIL MASK DISTORTION CONTROL USING NONSYMMETRIC PERFORATION RINGS, Microelectronic engineering, 42, 1998, pp. 225-228

Authors: FISHER A TEJEDA R SPRAGUE M ENGELSTAD R LOVELL E

Citation: A. Fisher et al., MECHANICAL MODELING OF ION-BEAM LITHOGRAPHY MASKS, Microelectronic engineering, 42, 1998, pp. 245-248