Authors: AMAR A LOZES RL SASAKI Y DAVIS JC PACKARD RE

Citation: A. Amar et al., FABRICATION OF SUBMICRON APERTURES IN THIN MEMBRANES OF SILICON-NITRIDE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 259-262