FABRICATION OF SUBMICRON APERTURES IN THIN MEMBRANES OF SILICON-NITRIDE

Authors
AMAR A LOZES RL SASAKI Y DAVIS JC PACKARD RE
Citation
A. Amar et al., FABRICATION OF SUBMICRON APERTURES IN THIN MEMBRANES OF SILICON-NITRIDE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(2), 1993, pp. 259-262
Citations number
14
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
11
Issue
2
Year of publication
1993
Pages
259 - 262
Database
ISI
SICI code
1071-1023(1993)11:2<259:FOSAIT>2.0.ZU;2-A
Abstract
A technique for manufacturing submicron apertures used for investigati ng hydrodynamic quantum phenomena in the superfluids He-4 and He-3 is described. The apertures are fabricated in approximately 100 nm thick suspended membranes of silicon nitride by using e-beam lithography and reactive ion etching.