Authors: SEVASTYANOV VS SHCHERBAKOV AY LYAMINA OM KUPRIYANOVA TA FILLIPPOV MN KHARKEVICH SI LOZINSKAYA TM

Citation: Vs. Sevastyanov et al., COMPOSITION OF MULTILAYER METALLIZED TRACKS IN INTEGRATED-CIRCUITS, Journal of analytical chemistry, 48(2), 1993, pp. 241-246