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Results: 1
SPATIAL CHARACTERIZATION OF DOPED SIC WAFERS BY RAMAN-SPECTROSCOPY
Authors:
BURTON JC SUN L POPHRISTIC M LUKACS SJ LONG FH FENG ZC FERGUSON IT
Citation:
Jc. Burton et al., SPATIAL CHARACTERIZATION OF DOPED SIC WAFERS BY RAMAN-SPECTROSCOPY, Journal of applied physics, 84(11), 1998, pp. 6268-6273
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