Authors: LORENZ H PARATTE L LUTHIER R DEROOIJ NF RENAUD P

Citation: H. Lorenz et al., LOW-COST TECHNOLOGY FOR MULTILAYER ELECTROPLATED PARTS USING LAMINATED DRY FILM RESIST, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 364-368

Authors: RACINE GA LUTHIER R LUGINBUHL P BROOKS K SETTER N DEROOIJ NF

Citation: Ga. Racine et al., HYBRID ULTRASONIC ELASTIC FORCE MOTORS MICROMACHINED IN SILICON, Integrated ferroelectrics, 8(1-2), 1995, pp. 25-34

Authors: MURALT P KHOLKIN A KOHLI M MAEDER T BROOKS KG LUTHIER R

Citation: P. Muralt et al., FABRICATION AND CHARACTERIZATION OF PZT THIN-FILMS FOR MICROMOTORS, Integrated ferroelectrics, 11(1-4), 1995, pp. 213-220

Authors: MURALT P KOHLI M MAEDER T KHOLKIN A BROOKS K SETTER N LUTHIER R

Citation: P. Muralt et al., FABRICATION AND CHARACTERIZATION OF PZT THIN-FILM VIBRATORS FOR MICROMOTORS, Sensors and actuators. A, Physical, 48(2), 1995, pp. 157-165

Authors: RACINE GA LUTHIER R DEROOIJ NF

Citation: Ga. Racine et al., PIEZOELECTRIC POSITION SENSOR FOR ULTRASONIC EFM MOTORS, Sensors and actuators. A, Physical, 42(1-3), 1994, pp. 661-665