Authors: Nakamura, S Suzuki, K Ataka, M Fujita, H Basrour, S Soumann, V Labachelerie, M Daniau, W

Citation: S. Nakamura et al., An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives, MICROSYST T, 5(2), 1998, pp. 69-71