AAAAAA
Results:
1-9
|
Results: 9
Authors:
Laimer, J
Misslinger, G
Stori, H
Citation: J. Laimer et al., Gas-phase chemistry in chlorine-containing nonequilibrium plasmas relevantfor diamond synthesis, NEW DIAM FR, 11(3), 2001, pp. 173-187
Authors:
Kugler, C
Fink, M
Laimer, J
Stori, H
Citation: C. Kugler et al., Dynamics of pulsed d.c. discharges used for PACVD - effect of additional high voltage pulses, SURF COAT, 142, 2001, pp. 424-428
Authors:
Kugler, C
Bauer, F
Laimer, J
Stori, H
Citation: C. Kugler et al., Is there a way to improve the uniformity of TiN deposition conditions in large pulsed d.c. plasma CVD reactors?, VACUUM, 61(2-4), 2001, pp. 379-383
Authors:
Misslinger, G
Laimer, J
Stori, H
Citation: G. Misslinger et al., Investigation of the plasma chemistry relevant for diamond deposition withchlorinated hydrocarbons, VACUUM, 61(2-4), 2001, pp. 413-417
Authors:
Laimer, J
Misslinger, G
Stori, H
Citation: J. Laimer et al., Mass spectrometry with a time resolution of a few milliseconds using a helium flushed probe system, VACUUM, 61(2-4), 2001, pp. 435-439
Authors:
Vorlaufer, G
Laimer, J
Stori, H
Citation: G. Vorlaufer et al., Determination of the gas kinetic temperature of a supersonic hydrogen plasma jet by using a monochromator with built-in planar Fabry-Perot interferometer, MEAS SCI T, 11(8), 2000, pp. 1179-1186
Authors:
Beer, TA
Laimer, J
Stori, H
Citation: Ta. Beer et al., Study of the ignition behavior of a pulsed dc discharge used for plasma-assisted chemical-vapor deposition, J VAC SCI A, 18(2), 2000, pp. 423-434
Authors:
Beer, TA
Laimer, J
Stori, H
Citation: Ta. Beer et al., Dynamics of a pulsed DC discharge used for plasma-assisted chemical vapor deposition - a case study for titanium nitride deposition, SURF COAT, 121, 1999, pp. 331-336
Authors:
Beer, TA
Laimer, J
Stori, H
Citation: Ta. Beer et al., Inhomogeneous deposition of TiN by pulsed PACVD caused by a plasma dynamiceffect, SURF COAT, 119, 1999, pp. 1016-1023
Risultati:
1-9
|