Authors:
Senez, V
Herbaux, J
Hoffmann, T
Lampin, E
Citation: V. Senez et al., 3-dimensional process simulation of thermal annealing of low dose implanted dopants in silicon, IEICE TR EL, E83C(8), 2000, pp. 1267-1274
Citation: E. Lampin et al., Modeling of the transient enhanced diffusion of boron implanted into preamorphized silicon, J APPL PHYS, 85(12), 1999, pp. 8137-8144