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Citation: H. Berney et al., Determination of the effect of processing steps on the CMOS compatibility of a surface micromachined pressure sensor, J MICROM M, 11(4), 2001, pp. 402-408

Authors: Hill, M O'Mahony, C Berney, H Hughes, PJ Hynes, E Lane, WA

Citation: M. Hill et al., Verification of 2-D MEMS model using optical profiling techniques, OPT LASER E, 36(2), 2001, pp. 169-183

Authors: Berney, H Hill, M Kelleher, AM Hynes, E O'Neill, M Lane, WA

Citation: H. Berney et al., Investigation of the effect of processing steps on stress in a polysiliconstructural membrane, J MICROM M, 10(2), 2000, pp. 223-234

Authors: Lillis, B Grogan, C Berney, H Lane, WA

Citation: B. Lillis et al., Investigation into immobilisation of lactate oxidase to improve stability, SENS ACTU-B, 68(1-3), 2000, pp. 109-114

Authors: Hynes, E O'Neill, M McAuliffe, D Berney, H Lane, WA Kelly, G Hill, M

Citation: E. Hynes et al., Development and characterisation of a surface micromachined FET pressure sensor on a CMOS process, SENS ACTU-A, 76(1-3), 1999, pp. 283-292