Authors:
Taylor, PJ
Jesser, WA
Martinka, M
Singley, KM
Dinan, JH
Lareau, RT
Wood, MC
Clark, WW
Citation: Pj. Taylor et al., Reduced carbon contaminant, low-temperature silicon substrate preparation for "defect-free" homoepitaxy, J VAC SCI A, 17(4), 1999, pp. 1153-1159