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Results:
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Results: 3
Dynamics of the EUV radiation in a fast micro-capillary plasma discharge source
Authors:
Hansen, TN Krisch, I Choi, P Larour, J Lunney, JG Castro, J Engel, A Guilbert, A Rous, J
Citation:
Tn. Hansen et al., Dynamics of the EUV radiation in a fast micro-capillary plasma discharge source, J PHYS IV, 11(PR2), 2001, pp. 417-420
Ultrafast hollow cathode triggered capillary discharge device as a strong XUV source
Authors:
Krisch, I Choi, P Larour, J Rous, J
Citation:
I. Krisch et al., Ultrafast hollow cathode triggered capillary discharge device as a strong XUV source, J PHYS IV, 11(PR2), 2001, pp. 605-608
A compact ultrafast capillary discharge for EUV projection lithography
Authors:
Krisch, I Choi, P Larour, J Favre, M Rous, J Leblanc, C
Citation:
I. Krisch et al., A compact ultrafast capillary discharge for EUV projection lithography, CONTR PLASM, 40(1-2), 2000, pp. 135-140
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