Authors:
Niederwald, H
Laux, S
Kennedy, M
Schallenberg, U
Duparre, A
Mertin, M
Kaiser, N
Ristau, D
Citation: H. Niederwald et al., Ion-assisted deposition of oxide materials at room temperature by use of different ion sources, APPL OPTICS, 38(16), 1999, pp. 3610-3613
Authors:
Laux, S
Kaiser, N
Zoller, A
Gotzelmann, R
Lauth, H
Bernitzki, H
Citation: S. Laux et al., Room-temperature deposition of indium tin oxide thin films with plasma ion-assisted evaporation, THIN SOL FI, 335(1-2), 1998, pp. 1-5