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Results:
1-8
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Results: 8
Authors:
Seifert, A
Ledermann, N
Hiboux, S
Baborowski, J
Muralt, P
Setter, N
Citation: A. Seifert et al., Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications, INTEGR FERR, 35(1-4), 2001, pp. 1889-1896
Authors:
Ledermann, N
Baborowski, J
Seifert, A
Willing, B
Hiboux, S
Muralt, P
Setter, N
Forster, M
Citation: N. Ledermann et al., Piezoelectric cantilever microphone for photoacoustic GAS detector, INTEGR FERR, 35(1-4), 2001, pp. 1907-1914
Authors:
Baborowski, J
Muralt, P
Ledermann, N
Colla, E
Seifert, A
Gentil, S
Setter, N
Citation: J. Baborowski et al., Mechanisms of Pb(Zr0.53Ti0.47)O-3 thin film etching with ECR/RF reactor, INTEGR FERR, 31(1-4), 2000, pp. 261-271
Authors:
Ledermann, N
Baborowski, J
Muralt, P
Xantopoulos, N
Tellenbach, JM
Citation: N. Ledermann et al., Sputtered silicon carbide thin films as protective coating for MEMS applications, SURF COAT, 125(1-3), 2000, pp. 246-250
Authors:
Baborowski, J
Muralt, P
Ledermann, N
Hiboux, S
Citation: J. Baborowski et al., Etching of RuO2 and Pt thin films with ECR/RF reactor, VACUUM, 56(1), 2000, pp. 51-56
Authors:
Baborowski, J
Muralt, P
Ledermann, N
Citation: J. Baborowski et al., Etching of platinum thin films with dual frequency ECR/RF reactor, INTEGR FERR, 27(1-4), 1999, pp. 1287-1300
Authors:
Ledermann, N
Seifert, A
Hiboux, S
Muralt, P
Citation: N. Ledermann et al., Effective transverse piezoelectric coefficient e(31,f) of (100)/(001) textured PZT thin films, INTEGR FERR, 24(1-4), 1999, pp. 13-18
Authors:
Muralt, P
Dubois, MA
Seifert, A
Taylor, DV
Ledermann, N
Hiboux, S
Citation: P. Muralt et al., In-plane piezoelectric coefficient of PZT thin films as a function of composition, FERROELECTR, 224(1-4), 1999, pp. 663-670
Risultati:
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