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Results: 1
3D probe for dimensional metrology on microsystem components
Authors:
Kleine-Besten, T Loheide, S Brand, U Schlachetzki, A Butefisch, S Buttgenbach, S
Citation:
T. Kleine-besten et al., 3D probe for dimensional metrology on microsystem components, TEC MES, 66(12), 1999, pp. 490-495
Risultati:
1-1
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