Authors:
Sakoda, T
Moise, TS
Summerfelt, SR
Colombo, L
Xing, GQ
Gilbert, SR
Loke, ALS
Ma, SM
Kavari, R
Wills, LA
Amano, J
Citation: T. Sakoda et al., Hydrogen-robust submicron IrOx/Pb(Zr,Ti)O-3/Ir capacitors for embedded ferroelectric memory, JPN J A P 1, 40(4B), 2001, pp. 2911-2916
Authors:
Summerfelt, SR
Moise, TS
Xing, G
Colombo, L
Sakoda, T
Gilbert, SR
Loke, ALS
Ma, S
Wills, LA
Kavari, R
Hsu, T
Amano, J
Johnson, ST
Vestcyk, DJ
Russell, MW
Bilodeau, SM
van Buskirk, P
Citation: Sr. Summerfelt et al., Demonstration of scaled (>= 0.12 mu m(2)) Pb(Zr,Ti)O-3 capacitors on W plugs with Al interconnect, APPL PHYS L, 79(24), 2001, pp. 4004-4006