Authors: Lungu, CP Lungu, AM Sakai, Y Sugawara, H Tabata, M Akazawa, M Miyamoto, M

Citation: Cp. Lungu et al., CxFy polymer film deposition in DC and RF fluorinert vapor plasmas, VACUUM, 59(1), 2000, pp. 210-219

Authors: Lungu, CP Lungu, AM Akazawa, M Sakai, Y Sugawara, H Tabata, M

Citation: Cp. Lungu et al., Fluorinated carbon films with low dielectric constant made from novel fluorocarbon source materials by RF plasma enhanced chemical vapor deposition, JPN J A P 2, 38(12B), 1999, pp. L1544-L1546