Authors:
MACAK K
NYBERG T
MACAK P
OLSSON MK
HELMERSSON U
BERG S
Citation: K. Macak et al., MODELING OF THE DEPOSITION OF STOICHIOMETRIC AL2O3 USING NONARCING DIRECT-CURRENT MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1286-1292
Authors:
OLSSON MK
MACAK K
HELMERSSON U
HJORVARSSON B
Citation: Mk. Olsson et al., HIGH-RATE REACTIVE DE MAGNETRON SPUTTER-DEPOSITION OF AL2O3 FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 639-643