Authors: LEE J MACK AS

Citation: J. Lee et As. Mack, FINITE-ELEMENT SIMULATION OF A STRESS HISTORY DURING THE MANUFACTURING PROCESS OF THIN-FILM STACKS IN VLSI STRUCTURES, IEEE transactions on semiconductor manufacturing, 11(3), 1998, pp. 458-464

Authors: FLINN PA MACK AS BESSER PR MARIEB TN

Citation: Pa. Flinn et al., STRESS-INDUCED VOID FORMATION IN METAL LINES, MRS bulletin, 18(12), 1993, pp. 26-35

Authors: BESSER PR MACK AS FRASER DB BRAVMAN JC

Citation: Pr. Besser et al., FINITE-ELEMENT MODELING AND X-RAY-MEASUREMENT OF STRAIN IN PASSIVATEDAL LINES DURING THERMAL CYCLING, Journal of the Electrochemical Society, 140(6), 1993, pp. 1769-1772