Authors: WESTERHEIM AC JONES RD MAGER PJ DUBASH JH DALTON TJ GOSS MW BAUM SK DASS SK

Citation: Ac. Westerheim et al., HIGH-DENSITY, INDUCTIVELY-COUPLED PLASMA ETCH OF SUB HALF-MICRON CRITICAL LAYERS - TRANSISTOR POLYSILICON GATE DEFINITION AND CONTACT FORMATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(5), 1998, pp. 2699-2706