Authors:
HOLLENSTEIN C
HOWLING AA
COURTEILLE C
MAGNI D
SCHOLZ SM
KROESEN GMW
SIMONS N
DEZEEUW W
SCHWARZENBACH W
Citation: C. Hollenstein et al., SILICON-OXIDE PARTICLE FORMATION IN RF PLASMAS INVESTIGATED BY INFRARED-ABSORPTION SPECTROSCOPY AND MASS-SPECTROMETRY, Journal of physics. D, Applied physics, 31(1), 1998, pp. 74-84
Authors:
SANSONNENS L
PLETZER A
MAGNI D
HOWLING AA
HOLLENSTEIN C
SCHMITT JPM
Citation: L. Sansonnens et al., A VOLTAGE UNIFORMITY STUDY IN LARGE-AREA REACTORS FOR RF PLASMA DEPOSITION, Plasma sources science & technology, 6(2), 1997, pp. 170-178