Authors: MAIERSCHNEIDER D KOPRULULU A HOLM SB OBERMEIER E

Citation: D. Maierschneider et al., ELASTIC PROPERTIES AND MICROSTRUCTURE OF LPCVD POLYSILICON FILMS, Journal of micromechanics and microengineering, 6(4), 1996, pp. 436-446

Authors: MAIERSCHNEIDER D MAIBACH J OBERMEIER E

Citation: D. Maierschneider et al., A NEW ANALYTICAL SOLUTION FOR THE LOAD-DEFLECTION OF SQUARE MEMBRANES, Journal of microelectromechanical systems, 4(4), 1995, pp. 238-241

Authors: MAIERSCHNEIDER D MAIBACH J OBERMEIER E SCHNEIDER D

Citation: D. Maierschneider et al., VARIATIONS IN YOUNGS MODULUS AND INTRINSIC STRESS OF LPCVD-POLYSILICON DUE TO HIGH-TEMPERATURE ANNEALING, Journal of micromechanics and microengineering, 5(2), 1995, pp. 121-124