Authors:
LESNIKOVA VP
TURTSEVICH AS
KRASNITSKY VY
EMELYANOV VA
NALIVAIKO OY
KRAVTSOV SV
MAKAREVICH TV
Citation: Vp. Lesnikova et al., THE STRUCTURE, MORPHOLOGY AND RESISTIVITY OF IN-SITU PHOSPHORUS-DOPEDPOLYSILICON FILMS, Thin solid films, 247(2), 1994, pp. 156-161