Authors: NURANI RK STROJWAS AJ MALY WP OUYANG C SHINDO W AKELLA R MCINTYRE MG DERRETT J

Citation: Rk. Nurani et al., IN-LINE YIELD PREDICTION METHODOLOGIES USING PATTERNED WAFER INSPECTION INFORMATION, IEEE transactions on semiconductor manufacturing, 11(1), 1998, pp. 40-47