Authors: WIND SJ TAUR Y LEE YH MII Y VISWANATHAN RG BUCCHIGNANO JJ POMERENE AT SICINA RM MILKOVE KR STIEBRITZ JW ROY RA HU CK MANNY MP COHEN S CHEN W

Citation: Sj. Wind et al., LITHOGRAPHY AND FABRICATION PROCESSES FOR SUB-100 NM SCALE COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2688-2695