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STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION
Authors:
BRUNO G CAPEZZUTO P CICALA G MANODORO P
Citation:
G. Bruno et al., STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 690-698
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