Authors: MANOVA D DIMITROVA V FUKAREK W KARPUZOV D

Citation: D. Manova et al., INVESTIGATION OF DC-REACTIVE MAGNETRON-SPUTTERED ALN THIN-FILMS BY ELECTRON-MICROPROBE ANALYSIS, X-RAY PHOTOELECTRON-SPECTROSCOPY AND POLARIZED INFRARED REFLECTION, Surface & coatings technology, 106(2-3), 1998, pp. 205-208

Authors: DIMITROVA V MANOVA D PASKOVA T UZUNOV T IVANOV N DECHEV D

Citation: V. Dimitrova et al., ALUMINUM NITRIDE THIN-FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING, Vacuum, 51(2), 1998, pp. 161-164