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Results:
1-15
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Results: 15
Authors:
STONGE L
MARGOT J
CHAKER M
Citation: L. Stonge et al., EXPERIMENTAL INVESTIGATION OF A LARGE-VOLUME SF6 MAGNETOPLASMA SOURCEBASED ON SURFACE-WAVE PROPAGATION, Plasma sources science & technology, 7(2), 1998, pp. 154-161
Authors:
MEREL P
TABBAL M
CHAKER M
MOISA S
MARGOT J
Citation: P. Merel et al., DIRECT EVALUATION OF THE SP(3) CONTENT IN DIAMOND-LIKE-CARBON FILMS BY XPS, Applied surface science, 136(1-2), 1998, pp. 105-110
Authors:
STONGE L
MARGOT J
CHAKER M
Citation: L. Stonge et al., CHARACTERIZATION OF THE NEGATIVE-ION FRACTION IN HIGH-DENSITY SF6 MAGNETOPLASMAS USING ION-ACOUSTIC-WAVES, Applied physics letters, 72(3), 1998, pp. 290-292
Authors:
MARGOT J
CHAKER M
STONGE L
TABBAL M
ALIOUCHOUCHE A
PAUNA O
ALINOT C
KLIAGINE C
Citation: J. Margot et al., HIGH-FREQUENCY MAGNETOPLASMAS IN ELECTRONEGATIVE GASES, Journal de physique. IV, 7(C4), 1997, pp. 295-305
Authors:
PERES I
DALLAIRE A
JONES P
MARGOT J
Citation: I. Peres et al., DEPENDENCE OF THE EMISSION CHARACTERISTICS OF MAGNETIZED SURFACE-WAVEPLASMAS ON THE AZIMUTHAL CONFIGURATION OF THE WAVE-FIELD, Journal of applied physics, 82(9), 1997, pp. 4211-4218
Authors:
PERES I
FORTIN M
MARGOT J
Citation: I. Peres et al., THE RADIAL STRUCTURE OF A MAGNETICALLY CONFINED SURFACE-WAVE PLASMA-COLUMN, Physics of plasmas, 3(5), 1996, pp. 1754-1769
Authors:
PERES I
MARGOT J
Citation: I. Peres et J. Margot, THE POWER BALANCE OF A MAGNETICALLY CONFINED SURFACE-WAVE PLASMA-COLUMN, Plasma sources science & technology, 5(4), 1996, pp. 653-661
Authors:
HUBERT J
BORDELEAU S
TRAN KC
MICHAUD S
MILETTE B
SING R
JALBERT J
BOUDREAU D
MOISAN M
MARGOT J
Citation: J. Hubert et al., ATOMIC SPECTROSCOPY WITH SURFACE-WAVE PLASMAS, Fresenius' journal of analytical chemistry, 355(5-6), 1996, pp. 494-500
Authors:
GAT E
BOUNASRI F
CHAKER M
RAVET MF
MOISAN M
MARGOT J
Citation: E. Gat et al., TEMPERATURE EFFECTS ON TUNGSTEN ETCHING, Microelectronic engineering, 30(1-4), 1996, pp. 337-340
Authors:
MARGOT J
MOISAN M
FORTIN M
Citation: J. Margot et al., POWER REQUIRED TO MAINTAIN AN ELECTRON IN A DISCHARGE - ITS USE AS A REFERENCE PARAMETER IN MAGNETIZED HIGH-FREQUENCY PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(6), 1995, pp. 2890-2899
Authors:
STONGE L
SADEGHI N
BOOTH JP
MARGOT J
BARBEAU C
Citation: L. Stonge et al., ON THE FORMATION AND LOSS OF S-2 MOLECULES IN A REACTIVE ION ETCHING REACTOR OPERATING WITH SF6, Journal of applied physics, 78(12), 1995, pp. 6957-6966
Authors:
BOUNASRI F
GAT E
CHAKER M
MOISAN M
MARGOT J
RAVET MF
Citation: F. Bounasri et al., HIGHLY ANISOTROPIC ETCHING OF SUBMICROMETER FEATURES ON TUNGSTEN, Journal of applied physics, 78(11), 1995, pp. 6780-6783
Authors:
BOUNASRI F
MOISAN M
STONGE L
MARGOT J
CHAKER M
PELLETIER J
ELKHAKANI MA
GAT E
Citation: F. Bounasri et al., ETCHING CHARACTERISTICS OF THIN-FILMS OF TUNGSTEN, AMORPHOUS-SILICON CARBIDE, AND SAL-603 RESIST SUBMITTED TO A SURFACE-WAVE DRIVEN SF6 MAGNETOPLASMA NEAR ELECTRON-CYCLOTRON-RESONANCE CONDITIONS, Journal of applied physics, 77(8), 1995, pp. 4030-4038
Authors:
MARGOT J
MOISAN M
Citation: J. Margot et M. Moisan, CHARACTERISTICS OF SURFACE-WAVE PROPAGATION IN DISSIPATIVE CYLINDRICAL PLASMA COLUMNS, Journal of Plasma Physics, 49, 1993, pp. 357-374
Authors:
GIAPIS KP
SADEGHI N
MARGOT J
GOTTSCHO RA
LEE TCJ
Citation: Kp. Giapis et al., LIMITS TO ION ENERGY CONTROL IN HIGH-DENSITY GLOW-DISCHARGES - MEASUREMENT OF ABSOLUTE METASTABLE ION CONCENTRATIONS, Journal of applied physics, 73(11), 1993, pp. 7188-7194
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1-15
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