Citation: Et. Carlen et Ch. Mastrangelo, STATISTICAL-MODEL FOR SPATIAL CORRELATION IN THIN-FILM DEPOSITION ANDREACTIVE GROWTH, IEEE transactions on semiconductor manufacturing, 11(3), 1998, pp. 511-521
Citation: Pf. Man et al., ELIMINATION OF POSTRELEASE ADHESION IN MICROSTRUCTURES USING CONFORMAL FLUOROCARBON COATINGS, Journal of microelectromechanical systems, 6(1), 1997, pp. 25-34
Citation: Ch. Mastrangelo et al., SURFACE-MICROMACHINED CAPACITIVE DIFFERENTIAL PRESSURE SENSOR WITH LITHOGRAPHICALLY DEFINED SILICON DIAPHRAGM, Journal of microelectromechanical systems, 5(2), 1996, pp. 98-105
Citation: M. Hasanuzzaman et Ch. Mastrangelo, PROCESS COMPILATION OF THIN-FILM MICRODEVICES, IEEE transactions on computer-aided design of integrated circuits and systems, 15(7), 1996, pp. 745-764
Authors:
HE Z
KNOLL GF
WEHE DK
ROJESKI R
MASTRANGELO CH
HAMMIG M
BARRETT C
URITANI A
Citation: Z. He et al., 1-D POSITION-SENSITIVE SINGLE CARRIER SEMICONDUCTOR, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 380(1-2), 1996, pp. 228-231
Authors:
BURNS MA
MASTRANGELO CH
SAMMARCO TS
MAN FP
WEBSTER JR
JOHNSON BN
FOERSTER B
JONES D
FIELDS Y
KAISER AR
BURKE DT
Citation: Ma. Burns et al., MICROFABRICATED STRUCTURES FOR INTEGRATED DNA ANALYSIS, Proceedings of the National Academy of Sciences of the United Statesof America, 93(11), 1996, pp. 5556-5561
Citation: Bp. Gogoi et Ch. Mastrangelo, ADHESION RELEASE AND YIELD ENHANCEMENT OF MICROSTRUCTURES USING PULSED LORENTZ FORCES, Journal of microelectromechanical systems, 4(4), 1995, pp. 185-192