Authors:
MATOSSIAN J
WEI RH
VAJO J
HUNT G
GARDOS M
CHAMBERS G
SOUCY L
OLIVER D
JAY L
TAYLOR CM
ALDERSON G
KOMANDURI R
PERRY A
Citation: J. Matossian et al., PLASMA-ENHANCED, MAGNETRON-SPUTTERED DEPOSITION (PMD) OF MATERIALS, Surface & coatings technology, 109(1-3), 1998, pp. 496-506