Authors: TURCU ICE ALLOT RM MANN CM REEVES C ROSS IN LISI N MADDISON BJ MOON SW PREWETT P STEVENSON JTM ROSS AWS GUNDLACH AM KOEK B MITCHELL P ANASTASI P MCCOARD C KIM NS

Citation: Ice. Turcu et al., X-RAY MICROFABRICATION AND NANOFABRICATION USING A LASER-PLASMA SOURCE AT 1 NM WAVELENGTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2495-2502