Citation: Am. Efremov et al., REFINEMENT OF EXCITATION CROSS-SECTIONS FOR ELECTRONIC STATES OF MOLECULES IN MATHEMATICAL-MODELING OF CHLORINE PLASMA, High energy chemistry, 29(6), 1995, pp. 433-434
Citation: Am. Efremov et al., THE INFLUENCE OF PRODUCTS OF COPPER ETCHING IN CHLORINE PLASMA ON ELECTRON-ENERGY DISTRIBUTION AND RATE COEFFICIENTS OF PROCESSES INVOLVINGELECTRONS, High energy chemistry, 29(2), 1995, pp. 137-138
Citation: Am. Efremov et al., MATHEMATICAL-MODELING OF GLOW-DISCHARGE P LASMA IN CHLORINE-OXYGEN MIXTURE, Izvestia vyssih ucebnyh zavedenij. Himia i himiceskaa tehnologia, 37(4-6), 1994, pp. 63-67