Authors: XIE JQ MO QW FENG JY

Citation: Jq. Xie et al., LOW-TEMPERATURE GROWTH OF REACTIVE PARTIALLY-IONIZED BEAM DEPOSITED ALN FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 124(4), 1997, pp. 519-522

Authors: FENG JY XIE JQ MO QW

Citation: Jy. Feng et al., REACTIVE PARTIALLY-IONIZED BEAM DEPOSITION OF ALN THIN-FILMS, Materials letters, 33(3-4), 1997, pp. 133-136