Authors: BAKLANOV MR KARPUSHIN AA MOGILNIKOV KP SOROKIN AN

Citation: Mr. Baklanov et al., THE ROLE OF THE NEGATIVELY CHARGED (SI3SI-F-2)(-) COMPLEXES IN INTERACTIONS OF FLUORINE WITH THE (111) SURFACE OF SILICON, Journal of structural chemistry, 37(1), 1996, pp. 11-17

Authors: SHARAFUTDINOV RG SKRYNNIKOV AV PARAKHNEVICH AV AYUPOV BM BADALIAN AM POLYAKOV OV BAKLANOV MR MOGILNIKOV KP BIRYUKOV SA

Citation: Rg. Sharafutdinov et al., HIGH-RATE DEPOSITION OF SI-H FILMS USING A FLOW PLASMA-CHEMICAL METHOD WITH ELECTRON-BEAM ACTIVATION, Journal of applied physics, 79(9), 1996, pp. 7274-7277